Summary


CNS ebeam lithography discussion forum

List for discussion of electron beam lithography in the Harvard CNS facility. Members my post questions regarding the Elionix, Raith, or JEOL system, or ask process questions. Members may also post and share solutions or other useful information such as

To contact the list owners, use the following email address: cns-ebeam-litho-list-owner@lists.fas.harvard.edu

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